Lighting for Semiconductor Applications | Entertainment & Industry

Semiconductor

The highest level of performance

Light is precise

OSRAM HBO^® Mercury short-arc lamps with power between 200W and 25,000W are used primarily as UV light sources in the manufacture of microchips, Liquid Crystal Displays (LCDs) and Printed Circuit Boards (PCBs). As a result of the continuous cooperation between ams OSRAM, as the lamp manufacturer, and the device manufacturers or the local users, a wealth of mercury short-arc lamps and their variants have been developed to ensure the right radiation for virtually any application. ams OSRAM also produces Infrared (IR) lamps for Rapid Thermal Processing (RTP) offering high quality performance to the meet the critical demands of the semiconductor industry.

Application Information

IC / Wafer Lithography

HBO^® lamps for UV exposure lithography of integrated circuits use the “i-line” of the emission spectrum (365nm),” g-line” (436nm), or deep UV emission (254nm).

LCD / OLED Lithography

HBO^® lamps for broad-band exposures of flat panel display substrates use g,h,i-lines (350nm-450nm). Long lifetime and high intensity types are available in the range of 4,300W to 25,000W.

Advanced Packaging

HBO^® lamps for UV exposure of packaging, MEMS, and LED lithography, are used for mask aligners, advanced packaging, and wafer inspection, with lamp wattages ranging from 350W to 2,500W.

IR / RTP

The OSRAM brand offers high quality Tungsten Halogen lamps for Rapid Thermal Processing, providing fast-reacting thermal profiles that are easy to control.