HBO (Microlithography)
Areas of application
- Microlithography
HBO Microlithography Lamps for ASML i-line Systems
Product features and benefits
- High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
- Designed for long lasting performance
- Qualified with ASML
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Areas of application
- Microlithography
HBO Microlithography Lamps for Canon i-line Systems
Product features and benefits
- High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
- Designed for long lasting performance
- Qualified with Canon
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Areas of application
- Microlithography
HBO Microlithography Lamps for Nikon i-line Systems
Product features and benefits
- High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
- Designed for long lasting performance
- Qualified with Nikon
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Areas of application
- Microlithography
HBO Microlithography Lamps for Süss Systems
Product features and benefits
- High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
- Designed for long lasting performance
- Qualified with Süss
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Areas of application
- Microlithography
HBO Microlithography Lamps for Other Systems
Product features and benefits
- High spectral intensity with peak irradiance at 365nm wavelength, making it ideal for microlithography
- Designed for long lasting performance
- Qualified with major microlithography equipment manufacturers
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